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Prices are current as of Sunday, 23/09/2018 20:01.

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Product Code: KQ150R-E

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If you are interested in this product, please contact us at sales@proscitech.com.


KQ150T is a compact turbomolecular-pumped coating system suitable for SEM, TEM and many thin film applications.

All Q150 models have a colour touch screen interface.

KQ150T is available in three versions:
KQ150T-S - high resolution sputter coater, suitable for oxidising and non-oxidising metals
KQ150T-E - high vacuum carbon coater for SEM and TEM applications
KQ150T-ES - high resolution sputter and high vacuum carbon coater


  • Metal sputtering or carbon evaporation, or both - can be combined in one space-saving design
  • Fine grain sputtering for advanced high resolution FE-SEM applications
  • High vacuum turbo pumping - allows sputtering of a wide range of oxidising and non-oxidising metals - suitable for SEM, high resolution FE-SEM and also for many thin film applications
  • Chamber size 152 (internal) x 127mm high (214mm high option available)
  • High vacuum carbon coating - ideal for SEM and TEM carbon coating applications
  • Advanced 'anti-stick' carbon rod evaporation gun - simple operation, reproducible results
  • Control of evaporation current profile - ensures consistently reproducible carbon films
  • Precise thickness control using the film thickness monitor option
  • Fully automatic touch screen control - rapid data input, simple operation
  • Multiple, customer-defined coating schedules can be stored - ideal for multi-user laboratories
  • Automatic vacuum control which can be pre-programmed to suit the process and material - no needle valve to adjust
  • 'Intelligent' recognition of system - automatically detects the type of coating insert fitted
  • Easy-to-change, drop-in style specimen stages (rotation stage as standard)
  • Vacuum shut-down feature - leaves the process chamber under vacuum when not in use - improved vacuum performance
  • Thick film capabilities - up to 60 minutes sputtering time without breaking vacuum (rest periods automatically built in)
  • Glow discharge option for S and ES (ask for price) - for modification of sample surface properties (eg hydrophobic to hydrophilic conversion) or for cleaning / removal of contaminating surface residues
  • Ergonomic one-piece moulded case - easy maintenance and service access
  • Ethernet with local FTP server connection - simple programmer updates
  • Power factor correction - complies with the current legislation (CE Certification) - efficient use of power means reduced running costs
  • Three-year warranty

Optional Accessories

  • Required is a backing pump: we recommend a 50L/m two-stage rotary pump with oil mist filter - (sold separately)
  • Additional sputter insert
  • Carbon rod insert (3.05mm rods)
  • Glow discharge insert
  • Additional glass cylinder assembly
  • Extended glass cylinder assembly
  • Rotating vacuum spigot
  • Film thickness monitor
  • FTM crystal
  • Tilt stage assembly
  • Slide stage
  • Rotacota stage
  • 4" wafer stage and gearbox
  • L gasket

More information and technical specifications
Product video of Q series of sputter/carbon coaters

Note that the glow discharge option is only available for KQ150T-S and KQ150T-ES

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