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Compact and efficient small Japanese made pumps, especially designed for clean-room use, in the manufacture of semiconductor devices, for evacuating medium sized vacuum desiccators or for suction on a filter flask. These pumps are useful for numerous other applications where an intermediate vacuum is required or when considerable water vapour is pumped.
Diaphragm pumps are a proficient and environmentally friendly alternative to water jet pumps. They do not consume water and, therefore, do not produce contaminated waste water.
Note: A larger diaphragm pump is available in the Emitech range (K pages). However, it should be noted that larger diaphragm pumps, when compared with rotary pumps (also called mechanical or fore-pumps) are a little noisier, require a little more maintenance, do not achieve as good an ultimate vacuum and are more expensive. The advantage of being totally oil-free remains and it is known that rotary pump oil can contaminate a system, streaming past the diffusion pump. Arguments for a diaphragm pump backing a turbo-molecular pump are weak, since that pump's action scarcely allows oil vapour into the pumped space.
- Oil-free for clean-room use
- Spark-less electro magnetic drive
- Long term high reliability
- Designed to minimise noise generation
- Compact design with strong Nylon housing
- Inlet and outlet HEPA filters
|Pumping Power||2.5 l/min (0.088 cfm)|
|Ultimate Pressure||-300 mmHg (-40 kPa)||-600 mmHg (-80 kPa)|
|Power Requirement||as required VAC|
|Consumption Power||5.0 W||10.0 W|
|Dimensions (DxWxH)||132 x 76 x 67mm||140 x 80 x 140mm|
|Life Expectancy||> 8760 hours|
|Wafer Size||Up to 6-inch||8 and 12-inch|
Electrostatic discharge (ESD) Safe Tubing
Static-Dissipative Grounding Kit
- The 110V pumps have plugs and cords conforming with USA and not CE standards.
- Low vacuum pump applications and selection: some considerations
- These pumps are recommended for use with Silicone Wafer Vacuum Wands
- Swabs on page M8
HEPA filter specifications
Water filtering time: 20s (Do not let the pump "inhale" liquid!); pressure loss: 0.42kPa; trapping efficiency: 99.99% of 0.3Micrometre particles; maximum filter temperature: 120 deg. C Manufacturer is ISO9001 certified.
VFV30-240 and VFV60-240 are suitable for Australia, New Zealand, Europe and other countries with a voltage of 220 - 240V.
VFV30-110 and VFV60-110 are suitable for USA, Canada and other countries with a voltage of 110V.
Supplied with a tube connector and tubing.